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APPLICATIONS
RICOR'S NEW, MORE COMPACT, SINGLE STAGE WATER VAPOR
CRYOPUMPS ADDRESS THE NEED FOR:
• Load Locks
• Tabletop Deposition Tools
• Semiconductor Packaging
• Microscope Specimen Prep
• Laboratory Research
• Chemical Processing
SPECIFICATIONS
Pumping Speed: 400 liter/sec
Cooling Time: 23 Minutes
30 Minutes [28V input]
[both K548]
Regeneration Time: 23 Minutes
Input Power: 45W (K-543)
40W (K-548)
Weight: 2 Kg
Ambient Temp Range: -10°C to 40°C
MTTF: 12,000 Hours
Input Voltage: 28V
Cooling Power: 45W (543)
40W (548)
* NanoStar is a new addition to RICOR’s flagship MicroStar™ single stage, water vapor cryopump product line
designed for large vacuum chamber applications.
The Nanostar operational temperature range of 1110K up to150K is useful for freezing out
other molecular compounds in a gaseous state including Sulphur Dioxide (SO2), Bromine (Br2),
and Iodine (I2).
Interface: All Standart DN63 Flanges