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DN / ISO 63 STIRLING 1.5W - 2.0W SINGLE
STAGE WATER VAPOR CRYOPUMP
The Cryo-Water Pump63 is based on the K548 1.5W midrange cryopump or K543
2.0W cryopump - the midrange pumping speed member of the NanoStar* line of
cryopumps designed specifically for tabletop or small vacuum deposition tools, PVD
/ PEVD / CVD / ALD chambers, and load locks.
A user powered and controlled built-in heater supports regeneration cycles and pumping
speeds support a vacuum chamber of up to 20-25 liters. The Cryo-Water Pump63
mounts directly to a turbo pump or in situ in its own port. It can reduce pump down
time by >50% during atmosphere to HV / UHV vent - pump cycles.
Combined with UV desorption / getter technology, NanoStar cryopumps provide a
means of water vapor reduction and control at UHV levels.
Compact and completely self-contained, with the Cryo-Water Pump63 there is no
need for big, power hungry compressors or gas lines. The onboard microcontroller
contains a temperature controller which offers stand-by remote shutdown and over
current protection.
N A N O S TA R
Water vapor cryopump 63
NANOSTAR 63