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SPECIFICATIONS
Pumping Speed: 150 liter /sec
Interface: All Standard DN40 Flanges
Cooling Time: 20 Minutes
Cooling Power: 1.5W
Regeneration Time: 15 Minutes
APPLICATIONS
RICOR'S NEW, MORE COMPACT, SINGLE STAGE WATER VAPOR
CRYOPUMPS ADDRESS THE NEED FOR:
• Load Locks
• Tabletop Deposition Tools
• Semiconductor Packaging
• Microscope Specimen Prep
• Laboratory Research
• Chemical Processing
* NanoStar is a new addition to RICOR’s flagship MicroStar™ single stage, water vapor cryopump product line
designed for large vacuum chamber applications.
Input Power: 40W
Weight: 1.5Kg
MTTF: 12,000 Hours
Ambient Temp Range: -10°C to 40°C
Input Voltage: 28V
The Nanostar operational temperature range of 1110K up to150K is useful for freezing out
other molecular compounds in a gaseous state including Sulphur Dioxide (SO2), Bromine (Br2),
and Iodine (I2).