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M I C R O S TA R
Water vapor cryopump 100
MICROSTAR 100
ISO & CF 100 STIRLING 18W TWIN PISTON
LINEAR WATER VAPOR PUMP
The ISO & CF 100 is a state-of-the-art completely self-contained compact cryogenic water vapor
pump. Based on the Ricor K535 cryocooler it does not require a separate helium compressor and
gas lines. This enables fast, simple and painless pump to tool integration at the lowest possible
cost. It significantly reduces power and footprint space making a clean cluster tool integration.
Water vapor in a vacuum system affects the pumpdown time and contamination levels in
almost all deposition process systems. It is one of the leading causes of failure in advanced
semiconductor package manufacturing.
The ISO & CF 100 provides exceptional performance for load locks and small vacuum deposition
tools with high gas loads including HV or UHV level PVD / PEVD / CVD / ALD chambers. It can
be utilized as a process chamber field upgrade to an existing pump system (mechanical or TMP).
This combination provides high water vapor pumping speeds and offers reduced partial
pressure of water, giving a total base pressure with up to a 50% decrease in pump down time.
REGENERATION
The ISO & CF 100 is equipped with a built-in reverse Stirling regeneration process that achieves
a full regeneration cycle in less than 40 minutes. As only water vapor is captured on the cold
panel (at the default temperature of120K), the regeneration process does not release hazardous
gases in dangerous concentrations into the vacuum system.