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DN / ISO 40 STIRLING 1.5W SINGLE STAGE
WATER VAPOR CRYOPUMP
Fast pump down is an effective way to reduce production costs and improve product quality.
The Cryo-Water Pump40, based on the K548 1.5W cryocooler, is the midrange pumping speed
member of the NanoStar* line of cryopumps. It mounts directly to a turbo pump or in situ
in its own port and can reduce pump down time by >50% during atmosphere to HV / UHV
vent - pump cycles.
The Cryo-Water Pump40 Single Stage Cryopump is designed specifically for tabletop and small
vacuum chamber deposition tools, analysis systems, and load locks. Pumping speeds support
up to a 15 liter vacuum chamber and a user powered and controlled built- in heater supports
regeneration cycles.
Emerging packaging technologies utilizing FOWLP (eWLB), WLCSP, 3D TSV ICs, Flip Chips,
SiP, OLEDs and MEMS are all susceptible to water vapor absorption with subsequent failure
mechanisms. Combined with UV desorption / getter technology, NanoStar cryopumps provide
a means of water vapor reduction and control up to UHV levels.
Compact and completely self-contained, with the Cryo-Water Pump40 there is no need for big,
power hungry compressors or gas lines. The onboard microcontroller contains a temperature
controller which offers stand-by remote shutdown and over current protection.
N A N O S TA R
Water vapor cryopump 40
NANOSTAR 40