Integral Rotary Integral Rotary K508 K508N K543 K561 K563 K562S K548 SPLIT ROTARY K549 SPLIT LINEAR K527 K529N K570 Cryocoolers for scientific instruments K535 N2 PURGE SYSTEMS N2 Purge Stocker Integrated Comparison Table K508K508NK543K561K563K562SK548