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Cryogenic Vacuum Pumps
High Temp. Super Conductors (HTSC)
Coolers for Scientific Instrumentation
N2 Purge Systems for Semiconductor FOUP's & SMIF's
Metal Wafer Cassettes
Cryocoolers for Gamma Rays Detection Systems
InnerSense, Diagnostic systems
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Company
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Technologies
Cooling Technologies
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Miniature Cryocoolers
Integral Rotary
Split Rotary
Split Linear
Integration Equipment
- - - - - - - - - - - - - - - - - - - - - - - - -
Advanced Products
Cryogenic Vacuum Pumps
High Temp. Super Conductors (HTSC)
Coolers for Scientific Instrumentation
N2 Purge Systems for Semiconductor FOUP's & SMIF's
Metal Wafer Cassettes
Cryocoolers for Gamma Rays Detection Systems
InnerSense, Diagnostic systems
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Centre of Excellence
About the Centre
Success Stories
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Advanced Products
> Cryogenic Vacuum Pumps
MicroStar ™
a self-contained cryogenic water vapor pump
Coolstar® CSWP
Water Vapor Pumps (CSWP)
Coolstar® Cryo Pumps
clean, fast pumping high vacuum solution
Cryodrive® Compressors
1.5 kW, 3.0 kW
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