The Microstar is a state-of-the-art,
completly self-contained,
compact cryogenic water vapor pump.
unlike conventional systems,
it does not require a separate helium
compressor and gas lines.
This enables fast, simple and painless
pump to tool integration,
at the lowest posible cost.
| Features benefits |
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No external compressor or gas liners Compact-Easy installation and
saving on footprint |
|
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Patented fast regeneration-No need Simple and safe system (fire
for heaters and combustion hazard free) |
|
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MTBF>30,000 HRS Simple and "bullet proof" cryo
machanism |
|
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Cooler is controlled by a simple easy * Base temp is user adjustable
to use temperature controller and can be alerted "on the
fly"
* Temp stability can be set to
a level of +-0.2 kelvin |
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Unique Stirling cryo cooler to chill the Stirling-The most production
cryogenic panel worthy efficient cooling cycle-
low input power |
|
| Maintenance Free Low cost of ownership |
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Controller includes RS-232 and Easy and simple pump to
discrete signals outputs tool integration |
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Water Cooled In Situ
Water Cooled In Line
Cryogenic Vacuum Pumps
